| Unique Name/Identifier | Semiconductor |
| Optional Description | |
| What does the fab manufacture? [§98.96] | Semiconductor |
| Method used to calculate f-GHG emissions for this fab from the plasma etch/wafer clean and chamber clean process types [§98.96(d)] | DefaultEmissionFactors |
| Does the fab have abatement systems (as defined in 98.98) through which F-GHG or N2O flow? | No |
| Is the fab claiming destruction or removal efficiency for those abatement systems (as defined in 98.98) at the fab? [§98.96(p)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (Greater than 300 mm) [§98.96(b)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (300 mm) [§98.96(b)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (200 mm) [§98.96(b)] | Yes |
| What Is the Diameter of the Wafers Manufactured at this Fab? (150 mm) [§98.96(b)] | Yes |
| What Is the Diameter of the Wafers Manufactured at this Fab? (Less than 150 mm) [§98.96(b)] | No |
| List the Specific Wafer Size(s) Less than 150mm Manufactured at this Fab [§98.96(b)] | |
| Annual Manufacturing Capacity at this Fab used in Equation I-5 (square meters) [§98.96(a)] | |
| Annual production for this fab in terms of substrate surface area (e.g., silicon, PV-cell, glass) (square meters) [§98.96(e)] | |
| Do the emissions for this fab include emissions from research and development activities, as defined in 98.6? | Yes |
| What is the approximate percentage of total GHG emissions, on a metric ton CO2e basis, that are attributable to research and development activities? [§98.96(x)] | less than 5 percent |
| What is the effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate? (decimal fraction) [§98.96(r)] | 0 |
| What method was used for this fab to develop the apportioning factors for fluorinated GHG and N20 consumption? [§98.96(m)(1)] | |
| Optional description of your system and method(s) used in the fab-specific apportioning model | |
| Description of quantifiable metric used in engineering model to apportion gas consumption [§98.96(m)(1)] | |
| Start date selected under 98.94(c)(2)(i). [§98.96(m)(2)] | 2016-01-01 |
| End date selected under 98.94(c)(2)(i). [§98.96(m)(2)] | 2016-12-31 |
| Certification that the gas(es) selected under 98.94(c)(2)(ii) for this fab corresponds to the largest quantity(ies) consumed, on a mass basis, of fluorinated GHG used at the fab in the reporting year which the facility is required to apportion. Note that if you compare the actual gas consumed to the modeled gas consumed for two fluorinated GHGs, you must certify that one of the fluorinated GHGs selected for comparison corresponds to the largest quantity consumed, on a mass basis, of fluorinated GHGs used at the fab that requires apportionment during the reporting year. [§98.96(m)(3)] | NotCertified |
| Reason for "not certified" selection (optional) | |
| Result of calculation comparing actual and modeled gas consumption under §98.94(c)(2)(v) (the percent difference between actual and modeled gas consumption, relative to actual gas consumption). [§98.96(m)(4)] | 0 |
| If you are required to apportion f-GHG consumption between fabs, as required by 98.94(c)(2)(v), certification that the gas(es) you selected under §98.94(c)(2)(ii) correspond(s) to the largest quantities consumed on a mass basis, of f-GHG used at your facility during the reporting year for which you are required to apportion. [§98.96(m)(5)] | NotCertified |
| Reason for "not certified" selection (optional) | |
| F-HTF [§98.96(c)(4)] | HFE-449sl, (HFE-7100) Isomer blend |
| Chemical Formula [§98.96(c)(4)] | C4F9OCH3, (CF3)2CFCF2OCH3 |
| Cas Number [§98.96(c)(4)] | 163702-07-6, 163702-08-7 |
| F-HTF Category [§98.96(c)(4)] | |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.1524 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | HFE-72DA (1,2-Trans-dichloroethylene + Ethyl nonafluorobutyl ether + Ethyl nonafluoroisobutyl ether + Methyl nonafluorobutyl ether + Methyl nonafluoroisobutyl ether + Isopropyl alcohol) |
| Chemical Formula [§98.96(c)(4)] | blend |
| Cas Number [§98.96(c)(4)] | 156-60-5, 163702-05-4, 163702-06-5, 163702-07-6, 163702-08-7, 67-63-0 |
| F-HTF Category [§98.96(c)(4)] | |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.5284 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | FC-770 (Perfluoroisopropylmorpholine) |
| Chemical Formula [§98.96(c)(4)] | C5F15NO |
| Cas Number [§98.96(c)(4)] | 1093615-61-2 |
| F-HTF Category [§98.96(c)(4)] | Fully fluorinated GHGs |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.2195 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | HFE-7500 (3-ethoxy-1,1,1,2,3,4,4,5,5,6,6,6-dodecafluoro-2-trifluoromethyl-hexane) |
| Chemical Formula [§98.96(c)(4)] | CF3CF2CF2CF(OC2H5)CF(CF3)2 |
| Cas Number [§98.96(c)(4)] | 297730-93-9 |
| F-HTF Category [§98.96(c)(4)] | Saturated HFEs and HCFEs with 3 or more carbon-hydrogen bonds |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.0109 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | DO2-TS |
| Chemical Formula [§98.96(c)(4)] | CF3(OCFCF3CF2)n-(OCF2)m-OCF3 |
| Cas Number [§98.96(c)(4)] | 69991-67-9 (g) |
| F-HTF Category [§98.96(c)(4)] | Fully fluorinated GHGs |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 1.0895 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | D03 |
| Chemical Formula [§98.96(c)(4)] | CF3(OCFCF3CF2)n-(OCF2)m-OCF3 |
| Cas Number [§98.96(c)(4)] | 69991-67-9 (o) |
| F-HTF Category [§98.96(c)(4)] | Fully fluorinated GHGs |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.5459 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | Fluorinert FC-72 |
| Chemical Formula [§98.96(c)(4)] | 100% perfluorocompounds (primarily compounds with six carbons) |
| Cas Number [§98.96(c)(4)] | 86508-42-1 |
| F-HTF Category [§98.96(c)(4)] | Fully fluorinated GHGs |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.1778 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| F-HTF [§98.96(c)(4)] | Galden DET |
| Chemical Formula [§98.96(c)(4)] | 100% 1-propene 1,1,2,3,3,3-hexafluoro-oxidized, polymd. |
| Cas Number [§98.96(c)(4)] | 69991-67-9 |
| F-HTF Category [§98.96(c)(4)] | Fully fluorinated GHGs |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0.5459 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |
| Unique Name/Identifier | MEMS |
| Optional Description | |
| What does the fab manufacture? [§98.96] | LCDsMEMsPVs |
| Method used to calculate f-GHG emissions for this fab from the plasma etch/wafer clean and chamber clean process types [§98.96(d)] | DefaultEmissionFactors |
| Does the fab have abatement systems (as defined in 98.98) through which F-GHG or N2O flow? | No |
| Is the fab claiming destruction or removal efficiency for those abatement systems (as defined in 98.98) at the fab? [§98.96(p)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (Greater than 300 mm) [§98.96(b)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (300 mm) [§98.96(b)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (200 mm) [§98.96(b)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (150 mm) [§98.96(b)] | No |
| What Is the Diameter of the Wafers Manufactured at this Fab? (Less than 150 mm) [§98.96(b)] | No |
| List the Specific Wafer Size(s) Less than 150mm Manufactured at this Fab [§98.96(b)] | |
| Annual Manufacturing Capacity at this Fab used in Equation I-5 (square meters) [§98.96(a)] | |
| Annual production for this fab in terms of substrate surface area (e.g., silicon, PV-cell, glass) (square meters) [§98.96(e)] | |
| Do the emissions for this fab include emissions from research and development activities, as defined in 98.6? | Yes |
| What is the approximate percentage of total GHG emissions, on a metric ton CO2e basis, that are attributable to research and development activities? [§98.96(x)] | less than 5 percent |
| What is the effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate? (decimal fraction) [§98.96(r)] | 0 |
| What method was used for this fab to develop the apportioning factors for fluorinated GHG and N20 consumption? [§98.96(m)(1)] | |
| Optional description of your system and method(s) used in the fab-specific apportioning model | |
| Description of quantifiable metric used in engineering model to apportion gas consumption [§98.96(m)(1)] | |
| Start date selected under 98.94(c)(2)(i). [§98.96(m)(2)] | 2016-01-01 |
| End date selected under 98.94(c)(2)(i). [§98.96(m)(2)] | 2016-12-31 |
| Certification that the gas(es) selected under 98.94(c)(2)(ii) for this fab corresponds to the largest quantity(ies) consumed, on a mass basis, of fluorinated GHG used at the fab in the reporting year which the facility is required to apportion. Note that if you compare the actual gas consumed to the modeled gas consumed for two fluorinated GHGs, you must certify that one of the fluorinated GHGs selected for comparison corresponds to the largest quantity consumed, on a mass basis, of fluorinated GHGs used at the fab that requires apportionment during the reporting year. [§98.96(m)(3)] | NotCertified |
| Reason for "not certified" selection (optional) | |
| Result of calculation comparing actual and modeled gas consumption under §98.94(c)(2)(v) (the percent difference between actual and modeled gas consumption, relative to actual gas consumption). [§98.96(m)(4)] | 0 |
| If you are required to apportion f-GHG consumption between fabs, as required by 98.94(c)(2)(v), certification that the gas(es) you selected under §98.94(c)(2)(ii) correspond(s) to the largest quantities consumed on a mass basis, of f-GHG used at your facility during the reporting year for which you are required to apportion. [§98.96(m)(5)] | NotCertified |
| Reason for "not certified" selection (optional) | |
| F-HTF [§98.96(c)(4)] | Fluorinert FC-72 |
| Chemical Formula [§98.96(c)(4)] | 100% perfluorocompounds (primarily compounds with six carbons) |
| Cas Number [§98.96(c)(4)] | 86508-42-1 |
| F-HTF Category [§98.96(c)(4)] | Fully fluorinated GHGs |
| Total Annual Emissions (metric tons) [§98.96(c)(4)] | 0 |
| Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)] | No |
| How many times were missing data procedures followed in this reporting year? [§98.96(s)] | 0 |
| What method was used to estimate the missing data? [§98.96(s)] | |