Facility Name:Texas Instruments Incorporated - Maine Fab
Facility Identifier:
Facility Reporting Year:2016
Facility Location:
Address: 5 Foden Road
City: South Portland
State: ME
Postal Code: 04106

Facility Site Details:
CO2 equivalent emissions from facility subparts C-II, SS, and TT (metric tons):120,177.6
CO2 equivalent emissions from supplier subparts LL-QQ (metric tons):
Biogenic CO2 emissions from facility subparts C-II, SS, and TT (metric tons):0
Cogeneration Unit Emissions Indicator:N
GHG Report Start Date:2016-01-01
GHG Report End Date:2016-12-31
Description of Changes to Calculation Methodology:
Did you use an EPA-approved BAMM in this reporting year for Subpart I?
Plant Code Indicator:N
Primary NAICS Code:334413
Second Primary NAICS Code:

Parent Company Details:
Parent Company Name:TEXAS INSTRUMENTS INC
Address:13500 North Central Expressway, Dallas,  TX 75423
Percent Ownership Interest:100

Subpart C: General Stationary Fuel Combustion

Gas Information Details

Gas NameBiogenic Carbon dioxide
Gas Quantity0 (Metric Tons)
Own Result?

Gas NameMethane
Gas Quantity0.1 (Metric Tons)
Own Result?

Gas NameNitrous Oxide
Gas Quantity0.011 (Metric Tons)
Own Result?

Gas NameCarbon Dioxide
Gas Quantity5,784.9 (Metric Tons)
Own Result?

Unit Details:
Unit Name : GP-1
Unit Type : OCS (Other combustion source)
Unit Description :
Other Unit Name :
Small Unit Aggregation Details:
Use Ivt Indicator: Y
Highest Maximum Rated Heat Input Capacity: 18.8
Cumulative Maximum Rated Heat Input Capacity:

Emission Details:
Annual CO2 mass emissions from sorbent: 0 (Metric Tons)
Annual Biogenic CO2 Emissions: 0 (metric tons)
Annual Fossil fuel based CO2 Emissions: 57.6 (metric tons)

Tier Fuel Details:
Fuel : Distillate Fuel Oil No. 2
Tier Name : Tier 1 (Equation C-1)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
57.6 (Metric Tons) 0.00 (Metric Tons) 0.000 (Metric Tons) 0.1 (Metric Tons) 0.1 (Metric Tons)


Unit Name : CP-1
Unit Type : OCS (Other combustion source)
Unit Description :
Other Unit Name :
Common Pipe Details:
Use Ivt Indicator: Y
Maximum Rated Heat Input Capacity: 29.3
Cumulative Maximum Rated Heat Input Capacity:

Emission Details:
Annual Biogenic CO2 Emissions: 0 (metric tons)
Annual Fossil fuel based CO2 Emissions: 5467.9 (metric tons)

Tier Fuel Details:
Fuel : Natural Gas (Weighted U.S. Average)
Tier Name : Tier 1 (Equation C-1)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
5366.3 (Metric Tons) 0.10 (Metric Tons) 0.010 (Metric Tons) 2.5 (Metric Tons) 3 (Metric Tons)


Fuel : Distillate Fuel Oil No. 2
Tier Name : Tier 1 (Equation C-1)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
101.6 (Metric Tons) 0.00 (Metric Tons) 0.001 (Metric Tons) 0.1 (Metric Tons) 0.2 (Metric Tons)


Unit Name : V-1
Unit Type : RTO (Regenerative thermal oxidizer)
Unit Description :
Individual Unit Details:
Use Ivt Indicator: Y
Maximum Rated Heat Input Capacity: 1.5 (mmBtu/hr)

Emission Details:
Annual CO2 mass emissions from sorbent: 0 (Metric Tons)
Annual Biogenic CO2 Emissions: 0 (metric tons)

Tier Fuel Details:
Fuel : Natural Gas (Weighted U.S. Average)
Tier Name : Tier 1 (Equation C-1)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
259.4 (Metric Tons) 0.00 (Metric Tons) 0.000 (Metric Tons) 0.1 (Metric Tons) 0.1 (Metric Tons)



Subpart I: Electronics Manufacturing

Gas Information Details

Gas NameNitrous Oxide
Gas Quantity12.658 (Metric Tons)
Own Result?

Gas NameNitrogen trifluoride
Gas Quantity0.4473 (Metric Tons)
Own Result?

Gas NameOther
Other Gas NameHT-200
Other Gas GHG GroupFully fluorinated GHGs
Gas Quantity0.5905 (Metric Tons)
Own Result?

Gas NameHFC-41
Gas Quantity0.0008 (Metric Tons)
Own Result?

Gas NameOther
Other Gas NameFC-3283/FC-8270 (Perfluorotripropylamine)
Other Gas GHG GroupFully fluorinated GHGs
Gas Quantity0.743 (Metric Tons)
Own Result?

Gas NamePFC C-1418
Gas Quantity0.0046 (Metric Tons)
Own Result?

Gas NameHFC-23
Gas Quantity0.2716 (Metric Tons)
Own Result?

Gas NamePFC-14 (Perfluoromethane)
Gas Quantity5.8871 (Metric Tons)
Own Result?

Gas NamePFC-116 (Perfluoroethane)
Gas Quantity3.138 (Metric Tons)
Own Result?

Gas NameSulfur hexafluoride
Gas Quantity0.1504 (Metric Tons)
Own Result?

Gas NamePerfluorocyclobutane
Gas Quantity0.0338 (Metric Tons)
Own Result?

Triennial Report Attachments
Uploaded File Name: 
Date: 



Subpart I Fab Details (for MFAB):
Unique Name/IdentifierMFAB
Optional Description
What does the fab manufacture? [§98.96]Semiconductor
Method used to calculate f-GHG emissions for this fab from the plasma etch/wafer clean and chamber clean process types [§98.96(d)]DefaultEmissionFactors
Does the fab have abatement systems (as defined in 98.98) through which F-GHG or N2O flow?No
Is the fab claiming destruction or removal efficiency for those abatement systems (as defined in 98.98) at the fab? [§98.96(p)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (Greater than 300 mm) [§98.96(b)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (300 mm) [§98.96(b)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (200 mm) [§98.96(b)]Yes
What Is the Diameter of the Wafers Manufactured at this Fab? (150 mm) [§98.96(b)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (Less than 150 mm) [§98.96(b)]No
List the Specific Wafer Size(s) Less than 150mm Manufactured at this Fab [§98.96(b)]
Annual Manufacturing Capacity at this Fab used in Equation I-5 (square meters) [§98.96(a)]
Annual production for this fab in terms of substrate surface area (e.g., silicon, PV-cell, glass) (square meters) [§98.96(e)]
Do the emissions for this fab include emissions from research and development activities, as defined in 98.6?No
What is the approximate percentage of total GHG emissions, on a metric ton CO2e basis, that are attributable to research and development activities? [§98.96(x)]
What is the effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate? (decimal fraction) [§98.96(r)]0
What method was used for this fab to develop the apportioning factors for fluorinated GHG and N20 consumption? [§98.96(m)(1)]
Optional description of your system and method(s) used in the fab-specific apportioning model
Description of quantifiable metric used in engineering model to apportion gas consumption [§98.96(m)(1)]
Start date selected under 98.94(c)(2)(i). [§98.96(m)(2)]2016-01-01
End date selected under 98.94(c)(2)(i). [§98.96(m)(2)]2016-12-31
Certification that the gas(es) selected under 98.94(c)(2)(ii) for this fab corresponds to the largest quantity(ies) consumed, on a mass basis, of fluorinated GHG used at the fab in the reporting year which the facility is required to apportion. Note that if you compare the actual gas consumed to the modeled gas consumed for two fluorinated GHGs, you must certify that one of the fluorinated GHGs selected for comparison corresponds to the largest quantity consumed, on a mass basis, of fluorinated GHGs used at the fab that requires apportionment during the reporting year. [§98.96(m)(3)]Certified
Reason for "not certified" selection (optional)
Result of calculation comparing actual and modeled gas consumption under §98.94(c)(2)(v) (the percent difference between actual and modeled gas consumption, relative to actual gas consumption). [§98.96(m)(4)]3.9
If you are required to apportion f-GHG consumption between fabs, as required by 98.94(c)(2)(v), certification that the gas(es) you selected under §98.94(c)(2)(ii) correspond(s) to the largest quantities consumed on a mass basis, of f-GHG used at your facility during the reporting year for which you are required to apportion. [§98.96(m)(5)]NotCertified
Reason for "not certified" selection (optional)


N2O Emissions Details
Method of reporting N2O emissions from chemical vapor deposition as calculated in Equation I-10 [§98.96(d)]Used default utilization factor from Table I-8
Total annual N2O emissions from chemical vapor deposition as calculated in Equation I-10 [§98.96(c)(3)]12.6581
Method of reporting N2O emissions from electronic manufacturing processes as calculated in Equation I-11 [§98.96(d)]Did not use N2O in other electronics manufacturing processes
Total annual N2O emissions from electronic manufacturing processes as calculated in Equation I-11 [§98.96(c)(3)]


F-GHG Emissions Details
Unique Name/IdentifierHFC-23
Chemical Formula [98.96(c)(1)]CHF3
Cas Number [98.96(c)(1)]75-46-7
Gas Category [98.96(c)(1)]
Gas NameHFC-23
Gas Description
Cas Number75-46-7
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.2716
Unique Name/IdentifierHFC-41
Chemical Formula [98.96(c)(1)]CH3F
Cas Number [98.96(c)(1)]593-53-3
Gas Category [98.96(c)(1)]
Gas NameHFC-41
Gas Description
Cas Number593-53-3
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.0008
Unique Name/IdentifierSulfur hexafluoride
Chemical Formula [98.96(c)(1)]SF6
Cas Number [98.96(c)(1)]2551-62-4
Gas Category [98.96(c)(1)]
Gas NameSulfur hexafluoride
Gas Description
Cas Number2551-62-4
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.1504
Unique Name/IdentifierNitrogen trifluoride
Chemical Formula [98.96(c)(1)]NF3
Cas Number [98.96(c)(1)]7783-54-2
Gas Category [98.96(c)(1)]
Gas NameNitrogen trifluoride
Gas Description
Cas Number7783-54-2
Process TypeChamber cleaning - remote plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.0121
Gas NameNitrogen trifluoride
Gas Description
Cas Number7783-54-2
Process TypeChamber cleaning - in situ plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.4352
Unique Name/IdentifierPFC-14 (Perfluoromethane)
Chemical Formula [98.96(c)(1)]CF4
Cas Number [98.96(c)(1)]75-73-0
Gas Category [98.96(c)(1)]
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]1.7103
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypeChamber cleaning - in situ plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]4.1667
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypeChamber cleaning - remote plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.0101
Unique Name/IdentifierPerfluorocyclobutane
Chemical Formula [98.96(c)(1)]C-C4F8
Cas Number [98.96(c)(1)]115-25-3
Gas Category [98.96(c)(1)]
Gas NamePerfluorocyclobutane
Gas Description
Cas Number115-25-3
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.0338
Unique Name/IdentifierPFC C-1418
Chemical Formula [98.96(c)(1)]c-C5F8
Cas Number [98.96(c)(1)]559-40-0
Gas Category [98.96(c)(1)]
Gas NamePFC C-1418
Gas Description
Cas Number559-40-0
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.0046
Unique Name/IdentifierPFC-116 (Perfluoroethane)
Chemical Formula [98.96(c)(1)]C2F6
Cas Number [98.96(c)(1)]76-16-4
Gas Category [98.96(c)(1)]
Gas NamePFC-116 (Perfluoroethane)
Gas Description
Cas Number76-16-4
Process TypeChamber cleaning - in situ plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]3.0024
Gas NamePFC-116 (Perfluoroethane)
Gas Description
Cas Number76-16-4
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.1356


F-HTF Emissions Details
F-HTF [§98.96(c)(4)]FC-3283/FC-8270 (Perfluorotripropylamine)
Chemical Formula [§98.96(c)(4)](C3F7)3N
Cas Number [§98.96(c)(4)]338-83-0
F-HTF Category [§98.96(c)(4)]Fully fluorinated GHGs
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.7430
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HT-200
Chemical Formula [§98.96(c)(4)]CF3(OCFCF3CF2)n-(OCF2)m-OCF3
Cas Number [§98.96(c)(4)]69991-67-9 (h)
F-HTF Category [§98.96(c)(4)]Fully fluorinated GHGs
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.5905
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]