Facility Name:Samsung Austin Semiconductor
Facility Identifier:
Facility Reporting Year:2016
Facility Location:
Address: 12100 Samsung Blvd
City: Austin
State: TX
Postal Code: 78754

Facility Site Details:
CO2 equivalent emissions from facility subparts C-II, SS, and TT (metric tons):577,201.5
CO2 equivalent emissions from supplier subparts LL-QQ (metric tons):
Biogenic CO2 emissions from facility subparts C-II, SS, and TT (metric tons):0
Cogeneration Unit Emissions Indicator:NA
GHG Report Start Date:2016-01-01
GHG Report End Date:2016-12-31
Description of Changes to Calculation Methodology:
Did you use an EPA-approved BAMM in this reporting year for Subpart I?
Plant Code Indicator:Y
Primary NAICS Code:334413
Second Primary NAICS Code:

Parent Company Details:
Parent Company Name:SAMSUNG ELECTRONICS AMERICA INC
Address:12100 Samsung Boulevard, Austin,  TX 78754
Percent Ownership Interest:100

Subpart C: General Stationary Fuel Combustion

Gas Information Details

Gas NameCarbon Dioxide
Gas Quantity46,451.3 (Metric Tons)
Own Result?

Gas NameBiogenic Carbon dioxide
Gas Quantity0 (Metric Tons)
Own Result?

Gas NameMethane
Gas Quantity0.87 (Metric Tons)
Own Result?

Gas NameNitrous Oxide
Gas Quantity0.087 (Metric Tons)
Own Result?

Unit Details:
Unit Name : GP-CUB1-Boilers
Unit Type : OCS (Other combustion source)
Unit Description :
Other Unit Name :
Small Unit Aggregation Details:
Use Ivt Indicator: N
Highest Maximum Rated Heat Input Capacity: 32.66
Cumulative Maximum Rated Heat Input Capacity:

Emission Details:
Annual CO2 mass emissions from sorbent: 0 (Metric Tons)
Annual Biogenic CO2 Emissions: 0 (metric tons)
Annual Fossil fuel based CO2 Emissions: 0 (metric tons)

Tier Fuel Details:
Fuel : Natural Gas (Weighted U.S. Average)
Tier Name : Tier 1 (Equation C-1b, natural gas billing in mmBtu)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
5105.1 (Metric Tons) 0.10 (Metric Tons) 0.010 (Metric Tons) 2.4 (Metric Tons) 2.9 (Metric Tons)

Equation C1b/C8b Inputs :
Natural Gas Usage : 96214 (mmBtu/year)

Fuel : Distillate Fuel Oil No. 2
Tier Name : Tier 1 (Equation C-1)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
29.4 (Metric Tons) 0.00 (Metric Tons) 0.000 (Metric Tons) 0 (Metric Tons) 0.1 (Metric Tons)

Equation C1/C8 Inputs :
Fuel Quantity : 2885 (gallons/year)

Unit Name : GP-TOs
Unit Type : OCS (Other combustion source)
Unit Description :
Other Unit Name :
Small Unit Aggregation Details:
Use Ivt Indicator: N
Highest Maximum Rated Heat Input Capacity: 4
Cumulative Maximum Rated Heat Input Capacity:

Emission Details:
Annual CO2 mass emissions from sorbent: 0 (Metric Tons)
Annual Biogenic CO2 Emissions: 0 (metric tons)
Annual Fossil fuel based CO2 Emissions: 0 (metric tons)

Tier Fuel Details:
Fuel : Natural Gas (Weighted U.S. Average)
Tier Name : Tier 1 (Equation C-1b, natural gas billing in mmBtu)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
2882.7 (Metric Tons) 0.05 (Metric Tons) 0.005 (Metric Tons) 1.4 (Metric Tons) 1.6 (Metric Tons)

Equation C1b/C8b Inputs :
Natural Gas Usage : 54330 (mmBtu/year)

Unit Name : GP-CUB2-Boilers
Unit Type : OCS (Other combustion source)
Unit Description :
Other Unit Name :
Small Unit Aggregation Details:
Use Ivt Indicator: N
Highest Maximum Rated Heat Input Capacity: 10.05
Cumulative Maximum Rated Heat Input Capacity:

Emission Details:
Annual CO2 mass emissions from sorbent: 0 (Metric Tons)
Annual Biogenic CO2 Emissions: 0 (metric tons)
Annual Fossil fuel based CO2 Emissions: 0 (metric tons)

Tier Fuel Details:
Fuel : Natural Gas (Weighted U.S. Average)
Tier Name : Tier 1 (Equation C-1b, natural gas billing in mmBtu)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
38384.5 (Metric Tons) 0.72 (Metric Tons) 0.072 (Metric Tons) 18.1 (Metric Tons) 21.6 (Metric Tons)

Equation C1b/C8b Inputs :
Natural Gas Usage : 723416 (mmBtu/year)

Fuel : Propane
Tier Name : Tier 1 (Equation C-1)
Tier Methodology Start Date : 2016-01-01
Tier Methodology End Date : 2016-12-31

Fuel Emission Details :
Total CO2 emissionsTotal CH4 emissionsTotal N2O emissionsTotal CH4 emissions CO2eTotal N2O emissions CO2e
49.6 (Metric Tons) 0.00 Y (Metric Tons) 0.000 Y (Metric Tons) 0.1 (Metric Tons) 0.1 (Metric Tons)

Equation C1/C8 Inputs :
Fuel Quantity : 8667 (gallons/year)


Subpart I: Electronics Manufacturing

Gas Information Details

Gas NameNitrous Oxide
Gas Quantity65.154 (Metric Tons)
Own Result?

Gas NameNitrogen trifluoride
Gas Quantity7.6268 (Metric Tons)
Own Result?

Gas NamePFC-14 (Perfluoromethane)
Gas Quantity27.4862 (Metric Tons)
Own Result?

Gas NamePerfluorocyclobutane
Gas Quantity0.4138 (Metric Tons)
Own Result?

Gas NameOther
Other Gas NameFC-3283/FC-8270 (Perfluorotripropylamine)
Other Gas GHG GroupFully fluorinated GHGs
Gas Quantity2.922 (Metric Tons)
Own Result?

Gas NameHFC-134a
Gas Quantity0.137 (Metric Tons)
Own Result?

Gas NamePFC-116 (Perfluoroethane)
Gas Quantity2.6625 (Metric Tons)
Own Result?

Gas NamePerfluorobuta-1,3-diene
Gas Quantity0.2173 (Metric Tons)
Own Result?

Gas NameOther
Other Gas NameHT-170
Other Gas GHG GroupFully fluorinated GHGs
Gas Quantity0.864 (Metric Tons)
Own Result?

Gas NameHFC-125
Gas Quantity0.137 (Metric Tons)
Own Result?

Gas NameOther
Other Gas NameFC-40/FC-43 (Perfluorotributylamine (PTBA))
Other Gas GHG GroupFully fluorinated GHGs
Gas Quantity0.047 (Metric Tons)
Own Result?

Gas NameHFC-41
Gas Quantity0.7385 (Metric Tons)
Own Result?

Gas NameHFC-23
Gas Quantity3.707 (Metric Tons)
Own Result?

Gas NameHFC-143a
Gas Quantity0.089 (Metric Tons)
Own Result?

Gas NameOther
Other Gas NameHT-200
Other Gas GHG GroupFully fluorinated GHGs
Gas Quantity2.93 (Metric Tons)
Own Result?

Gas NameHFC-32
Gas Quantity0.328 (Metric Tons)
Own Result?

Gas NameSulfur hexafluoride
Gas Quantity0.7185 (Metric Tons)
Own Result?

Triennial Report Attachments
Uploaded File Name: 
Date: 



Subpart I Fab Details (for SAS):
Unique Name/IdentifierSAS
Optional Description
What does the fab manufacture? [§98.96]Semiconductor
Method used to calculate f-GHG emissions for this fab from the plasma etch/wafer clean and chamber clean process types [§98.96(d)]DefaultEmissionFactors
Does the fab have abatement systems (as defined in 98.98) through which F-GHG or N2O flow?No
Is the fab claiming destruction or removal efficiency for those abatement systems (as defined in 98.98) at the fab? [§98.96(p)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (Greater than 300 mm) [§98.96(b)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (300 mm) [§98.96(b)]Yes
What Is the Diameter of the Wafers Manufactured at this Fab? (200 mm) [§98.96(b)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (150 mm) [§98.96(b)]No
What Is the Diameter of the Wafers Manufactured at this Fab? (Less than 150 mm) [§98.96(b)]No
List the Specific Wafer Size(s) Less than 150mm Manufactured at this Fab [§98.96(b)]
Annual Manufacturing Capacity at this Fab used in Equation I-5 (square meters) [§98.96(a)]
Annual production for this fab in terms of substrate surface area (e.g., silicon, PV-cell, glass) (square meters) [§98.96(e)]
Do the emissions for this fab include emissions from research and development activities, as defined in 98.6?No
What is the approximate percentage of total GHG emissions, on a metric ton CO2e basis, that are attributable to research and development activities? [§98.96(x)]
What is the effective fab-wide destruction or removal efficiency value calculated using Equations I-26, I-27 and I-28, as appropriate? (decimal fraction) [§98.96(r)]0
What method was used for this fab to develop the apportioning factors for fluorinated GHG and N20 consumption? [§98.96(m)(1)]
Optional description of your system and method(s) used in the fab-specific apportioning model
Description of quantifiable metric used in engineering model to apportion gas consumption [§98.96(m)(1)]
Start date selected under 98.94(c)(2)(i). [§98.96(m)(2)]2016-01-16
End date selected under 98.94(c)(2)(i). [§98.96(m)(2)]2016-02-22
Certification that the gas(es) selected under 98.94(c)(2)(ii) for this fab corresponds to the largest quantity(ies) consumed, on a mass basis, of fluorinated GHG used at the fab in the reporting year which the facility is required to apportion. Note that if you compare the actual gas consumed to the modeled gas consumed for two fluorinated GHGs, you must certify that one of the fluorinated GHGs selected for comparison corresponds to the largest quantity consumed, on a mass basis, of fluorinated GHGs used at the fab that requires apportionment during the reporting year. [§98.96(m)(3)]Certified
Reason for "not certified" selection (optional)
Result of calculation comparing actual and modeled gas consumption under §98.94(c)(2)(v) (the percent difference between actual and modeled gas consumption, relative to actual gas consumption). [§98.96(m)(4)]8
If you are required to apportion f-GHG consumption between fabs, as required by 98.94(c)(2)(v), certification that the gas(es) you selected under §98.94(c)(2)(ii) correspond(s) to the largest quantities consumed on a mass basis, of f-GHG used at your facility during the reporting year for which you are required to apportion. [§98.96(m)(5)]Certified
Reason for "not certified" selection (optional)


N2O Emissions Details
Method of reporting N2O emissions from chemical vapor deposition as calculated in Equation I-10 [§98.96(d)]Used default utilization factor from Table I-8
Total annual N2O emissions from chemical vapor deposition as calculated in Equation I-10 [§98.96(c)(3)]57.1297
Method of reporting N2O emissions from electronic manufacturing processes as calculated in Equation I-11 [§98.96(d)]Used default utilization factor from Table I-8
Total annual N2O emissions from electronic manufacturing processes as calculated in Equation I-11 [§98.96(c)(3)]8.023815


F-GHG Emissions Details
Unique Name/IdentifierHFC-23
Chemical Formula [98.96(c)(1)]CHF3
Cas Number [98.96(c)(1)]75-46-7
Gas Category [98.96(c)(1)]
Gas NameHFC-23
Gas Description
Cas Number75-46-7
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]3.707
Unique Name/IdentifierHFC-32
Chemical Formula [98.96(c)(1)]CH2F2
Cas Number [98.96(c)(1)]75-10-5
Gas Category [98.96(c)(1)]
Gas NameHFC-32
Gas Description
Cas Number75-10-5
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.271
Unique Name/IdentifierHFC-41
Chemical Formula [98.96(c)(1)]CH3F
Cas Number [98.96(c)(1)]593-53-3
Gas Category [98.96(c)(1)]
Gas NameHFC-41
Gas Description
Cas Number593-53-3
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.7385
Unique Name/IdentifierSulfur hexafluoride
Chemical Formula [98.96(c)(1)]SF6
Cas Number [98.96(c)(1)]2551-62-4
Gas Category [98.96(c)(1)]
Gas NameSulfur hexafluoride
Gas Description
Cas Number2551-62-4
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.7185
Unique Name/IdentifierNitrogen trifluoride
Chemical Formula [98.96(c)(1)]NF3
Cas Number [98.96(c)(1)]7783-54-2
Gas Category [98.96(c)(1)]
Gas NameNitrogen trifluoride
Gas Description
Cas Number7783-54-2
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.0350
Gas NameNitrogen trifluoride
Gas Description
Cas Number7783-54-2
Process TypeChamber cleaning - remote plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]2.3979
Gas NameNitrogen trifluoride
Gas Description
Cas Number7783-54-2
Process TypeChamber cleaning - in situ thermal
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]1.3990
Gas NameNitrogen trifluoride
Gas Description
Cas Number7783-54-2
Process TypeChamber cleaning - in situ plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]3.7949
Unique Name/IdentifierPFC-116 (Perfluoroethane)
Chemical Formula [98.96(c)(1)]C2F6
Cas Number [98.96(c)(1)]76-16-4
Gas Category [98.96(c)(1)]
Gas NamePFC-116 (Perfluoroethane)
Gas Description
Cas Number76-16-4
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]2.6625
Unique Name/IdentifierPerfluorobuta-1,3-diene
Chemical Formula [98.96(c)(1)]CF2=CFCF=CF2
Cas Number [98.96(c)(1)]685-63-2
Gas Category [98.96(c)(1)]
Gas NamePerfluorobuta-1,3-diene
Gas Description
Cas Number685-63-2
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.2173
Unique Name/IdentifierPerfluorocyclobutane
Chemical Formula [98.96(c)(1)]C-C4F8
Cas Number [98.96(c)(1)]115-25-3
Gas Category [98.96(c)(1)]
Gas NamePerfluorocyclobutane
Gas Description
Cas Number115-25-3
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.4138
Unique Name/IdentifierPFC-14 (Perfluoromethane)
Chemical Formula [98.96(c)(1)]CF4
Cas Number [98.96(c)(1)]75-73-0
Gas Category [98.96(c)(1)]
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypePlasma etching / Wafer cleaning
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]16.2469
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypeChamber cleaning - remote plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]10.5788
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypeChamber cleaning - in situ thermal
Calculation MethodAssumed utilization/by-product formation rates = 0
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.05
Gas NamePFC-14 (Perfluoromethane)
Gas Description
Cas Number75-73-0
Process TypeChamber cleaning - in situ plasma
Calculation MethodUsed default factors
Annual emissions for this F-GHG - Process Type - Calculation Method (metric tons) [98.96(c)(1)]0.6105


F-HTF Emissions Details
F-HTF [§98.96(c)(4)]FC-3283/FC-8270 (Perfluorotripropylamine)
Chemical Formula [§98.96(c)(4)](C3F7)3N
Cas Number [§98.96(c)(4)]338-83-0
F-HTF Category [§98.96(c)(4)]Fully fluorinated GHGs
Total Annual Emissions (metric tons) [§98.96(c)(4)]2.922
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]FC-40/FC-43 (Perfluorotributylamine (PTBA))
Chemical Formula [§98.96(c)(4)](C4F9)3N
Cas Number [§98.96(c)(4)]1064698-37-8
F-HTF Category [§98.96(c)(4)]Fully fluorinated GHGs
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.047
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HFC-125
Chemical Formula [§98.96(c)(4)]C2HF5
Cas Number [§98.96(c)(4)]354-33-6
F-HTF Category [§98.96(c)(4)]
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.137
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HFC-134a
Chemical Formula [§98.96(c)(4)]CH2FCF3
Cas Number [§98.96(c)(4)]811-97-2
F-HTF Category [§98.96(c)(4)]
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.137
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HFC-143a
Chemical Formula [§98.96(c)(4)]C2H3F3
Cas Number [§98.96(c)(4)]420-46-2
F-HTF Category [§98.96(c)(4)]
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.089
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HFC-32
Chemical Formula [§98.96(c)(4)]CH2F2
Cas Number [§98.96(c)(4)]75-10-5
F-HTF Category [§98.96(c)(4)]
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.057
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HT-170
Chemical Formula [§98.96(c)(4)]CF3(OCFCF3CF2)n-(OCF2)m-OCF3
Cas Number [§98.96(c)(4)]69991-67-9 (f)
F-HTF Category [§98.96(c)(4)]Fully fluorinated GHGs
Total Annual Emissions (metric tons) [§98.96(c)(4)]0.864
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]
F-HTF [§98.96(c)(4)]HT-200
Chemical Formula [§98.96(c)(4)]CF3(OCFCF3CF2)n-(OCF2)m-OCF3
Cas Number [§98.96(c)(4)]69991-67-9 (h)
F-HTF Category [§98.96(c)(4)]Fully fluorinated GHGs
Total Annual Emissions (metric tons) [§98.96(c)(4)]2.93
Were missing data procedures used to estimate inputs into the fluorinated heat transfer fluid mass balance equation under $98.95(b)? [§98.96(s)]No
How many times were missing data procedures followed in this reporting year? [§98.96(s)]0
What method was used to estimate the missing data? [§98.96(s)]